MEMS

Measurement Range

±20 g

Bandwidth

100 Hz

Zero Bias Stability

≤0.05 mg

Zero Bias Repeatability

≤0.3 mg

Measurement Range

±500 °/s

Bandwidth

95 Hz

Scale Factor Nonlinearity

≤500 ppm

Scale Factor Repeatability

≤800 ppm

Gyroscope Bias Stability (1σ)

0.05 °/hr

Angular Random Walk

0.02 °/√hr

Gyroscope Dynamic Range

±400 °/s

Accelerometer Bias Stability (1σ)

0.01 mg

Measurement Range

±30 ±10

Bandwidth

200 200

Zero Bias Stability

≤0.3 ≤0.3

Zero Bias Repeatability

≤0.5 ≤0.5

Measurement Range

±100 °/s

Bandwidth

12.5 Hz

Scale Factor Nonlinearity

≤200 ppm

Scale Factor Repeatability

≤50 ppm

Measurement Range

±450 °/s

In-Run Bias Stability

≤1.0 °/h

Angular Random Walk

≤0.12 °/√h

Scale Factor Error

≤0.05 %

Measurement Range

±20 ±10

Bandwidth

200 200

Zero Bias Stability (1σ)

≤1 ≤0.5

Zero Bias Repeatability (1σ)

≤2 ≤0.5

Measurement Range

±450 °/s

In-Run Bias Stability

≤1.5 °/h

Angular Random Walk

≤0.15 °/√h

Scale Factor Error

≤0.1 %

Measurement Range

±20 ±10

Bandwidth

200 200

Zero Bias Stability (1σ)

≤0.5 ≤0.3

Zero Bias Repeatability (1σ)

≤1 ≤0.5

Measuring Range

±400 °/s

Bias Instability (Allan Variance)

0.05 °/h

Bias Stability (RMS, 10s)

— °/h

Bias Drift (Full Temp, RMS)

— °/h

Measurement Range

±300 °/s

Zero Bias

±0.05 °/s

Zero Bias Stability (10s)

≤1 °/h

Zero Bias Repeatability

≤5 °/h

Measurement Range

— °/s

Bias Instability

Allan Variance °/h

Bias Stability

1s smoothing, RMS, room temperature °/h

Full Temp Bias Variation

10s smoothing, RMS, temp rate 1°C/min °/h

Measurement Range

±400 °/s

Zero Bias Stability¹

≤5 °/h

Zero Bias Temperature Drift²

≤15 °/h

Zero Bias g Sensitivity

≤1 °/h/g

Measurement Range

±400 °/s

Zero Bias Stability¹

≤1 °/h

Zero Bias Temperature Drift²

≤5 °/h

Zero Bias g Sensitivity

≤1 °/h/g

Measurement Range

±4000 °/s

Zero Bias Stability

≤30 / ≤50 °/h

Full Temperature¹ Zero Bias Stability

≤100 °/h

Zero Bias Repeatability

≤30 / ≤50 °/h

Measurement Range

±3600 °/s

Scale Factor

1990–2010 LSB/(°/s)

Scale Factor Nonlinearity

≤150 ppm

Zero Bias¹

±0.05 °/h

Measurement Range

±100 °/s

Zero Bias Stability¹

≤0.1 °/h

Zero Bias Temperature Drift²

≤5 °/h

Zero Bias g Sensitivity

≤0.5 °/h/g