MEMS IMU with RS-422 Output and Full-Temperature Compensation
MEMS Inertial Measurement Unit (IMU) · CGM66EK10
Compact MEMS inertial measurement unit integrating a three-axis gyroscope, three-axis accelerometer, temperature sensor, and embedded compensation algorithms with RS-422 digital output. Full-temperature bias compensation from −45 °C to +85 °C, 1-second startup, and low power consumption for stabilization and navigation integration.
Measurement Range
— °/s
Bias Instability
Allan Variance °/h
Bias Stability
1s smoothing, RMS, room temperature °/h
The CGM66EK10 is a compact, lightweight MEMS Inertial Measurement Unit (IMU) that integrates a three-axis gyroscope, three-axis accelerometer, temperature sensor, and embedded compensation algorithms. It delivers precise angular rate, acceleration, and tilt measurements via an RS-422 digital interface, making it ideal for applications requiring high dynamic performance and stability.
With its advanced temperature compensation and low power consumption, this device provides reliable performance in space-constrained applications while maintaining high accuracy across a wide temperature range. Key Features
- Tri-axis gyroscope and accelerometer
- Full temperature range bias compensation
- High bias stability and low random walk
- RS-422 digital communication
- External TTL trigger support
- Fast 1-second startup
- Low power consumption
- Compact and rugged design
Applications
Technical Specifications
Gyroscope Specifications
- Measurement Range
- — °/s
- Bias Instability
- Allan Variance °/h
- Bias Stability
- 1s smoothing, RMS, room temperature °/h
- Full Temp Bias Variation
- 10s smoothing, RMS, temp rate 1°C/min °/h
- Angle Random Walk
- Allan Variance °/√h
- Bias Repeatability
- Q = 6, room temperature °/h
- Acceleration Sensitivity
- Under ±1g °/h/g
- Resolution
- — °/h
- Output Noise
- Peak (3σ) °/s
- Scale Factor Nonlinearity
- Room temperature ppm
- Scale Factor Repeatability
- Q = 3, room temperature ppm
- Cross-Axis Sensitivity
- Room temperature %
- Bandwidth
- — Hz
Accelerometer Specifications
- Accelerometer Measurement Range
- — g
- Accelerometer Bias Stability
- 1s smoothing, RMS, room temperature mg
- Full Temp Bias Variation
- 10s smoothing, RMS, temp rate 1°C/min mg
- Bias Repeatability
- Q = 6, room temperature mg
- Resolution
- — mg
- Scale Factor Nonlinearity
- Room temperature ppm
- Scale Factor Repeatability
- Q = 3, room temperature ppm
- Cross-Axis Sensitivity
- Room temperature %
- Bandwidth
- — Hz
Electrical and Environmental Specifications
- Weight
- 120 g
- Startup Time
- 1 s
- Input Voltage
- +5 ± 0.5 V
- Startup Current
- < 400 mA
- Power Consumption
- < 1.2 W
- Power Ripple
- 100 mV
- Operating Temperature
- -45 to +85 °C
- Storage Temperature
- -55 to +105 °C
- [1]Bias instability and angular random walk are characterized by Allan variance; bias stability figures are 1 s smoothing RMS at room temperature.
- [2]Full-temperature bias variation is specified at a temperature rate of 1 °C/min with 10 s smoothing RMS.
- [3]Per-axis and per-range values are confirmed for the delivered configuration.
Package Information
Technical Drawings




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Gyroscope Bias Stability (1σ)
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